Diversified Analysis of Pure Phase Elements for Uniform Illumination Xu Junzhong, Zhao Yiqiong, Wang Wei, Li Yongping Department of Physics, University of Science and Technology of China, Hefei 230026, China, China. The dependence of the design of pure phase components on various parameter parameters of practical application systems. And the positive and negative film in the etching process was also studied. It has its unique guiding significance for the process of pure phase elementary cattle. 1 Introduction With the progress of microfabrication technology, diffractive optics has become the most interesting field in information science.
Pure phase components based on the principles of diffractive optics have many important features that can shape beams of any shape. Inertial confinement nuclear fusion! 61 In the 8 system end-of-range field intensity uniformization, the output field beam is required to have a flat top and no side lobes. These extremely demanding requirements are simply impossible to achieve with conventional optical components. The mountain factory, such as Di Di 8 body turbidity, makes it a very effective way to solve this difficult class. At the same time, the application can greatly reduce the cost and complexity of the lamp system, so the design and production of uniform lighting is also the most active class in the research of the driver. However, in the actual Dan design, usually only find Ten pairs of machine-specific parameters are set. Such as light wavelength into, upper lens focal length and so on. Hey. These parameters have changed, or the actual requirements of the system have been changed, and whether the design is still applicable to the new system, there is a generality of the work. At the same time, in the actual production process, we also found positive and negative film questions. The in-depth discussion of the above-mentioned types of questions has important guiding significance for us to make full use of existing conditions to design and process and improve the quality of the devices.
2. Introduction to the design method In the homogenization of illumination, the end of the system is equivalent to a hungry transformation system.
Fund project country 8631623.7 class funded project 3 general questions can usually be designed for group-specific practical system parameters, and the actual system parameters change, designed, can still be made, must be designed The question asked to solve the problem should be the wavelength of the light in the actual number of dreams of the system. The dependence of the upper lens on the eschar. To see the versatility of the foot. Below we solve it through theoretical derivation. For the general Vapor case, let the design calculate the complex amplitude transmittance of the incident beam center 19942014 ChinaAcademicJoumal 71.31. The person is the wavelength, which is the focal length of the lens of the system.
The general optical system has 1 symmetry. And taking into account our continuous process scheme 12, the advantage of the original 1 transform 1 with the anvil is replaced by the first step of the 61 transform, where the zero order is the 861 function.
In the design process, we use the algorithm of self-consistent iterative method and optimization algorithm. 1. The basic idea is to set the ideal super-commercial input light field and output light field intensity. After the input and output fields are added to the phase flash, the forward and reverse transforms are repeated. In the iterative process, we use the phase blending algorithm edge. 01 oil, 4 pairs of phase processing, the previous bit is believed to force the amplitude of the previous part to make it an ideal waveform. After the iterative process, the amplitude and phase é‚° tend to be stable. Then, the obtained phase is taken as the optimized initial solution, and it is repeatedly optimized by the simulated annealing method until the temperature cannot be lowered, and the output time of the output is distributed, and the phase data of the incident field is sufficient for the designed bit and distribution.
Through the hybrid iterative optimization method, the median phase distribution and the target surface intensity distribution of the luminescence wavelength 351. The system main lens focal length 600, input, optical aperture 100, we designed the uniform distribution of the target field uniform illumination 2 .
The flat-top light field of the ideal of history has not yet been discovered.
The width of the sampling window in the direction is 1 and the heart is emitted. The width of the sample window is 1 and the sweat is added to the milk.
The 8 coffee sampling theorem 5 takes the form as follows. The number of sampling points in the direction.
Taking into account Equations 1 and 2 at the same time, it can be seen that the two parameters are actually equivalent, and their effects on the results are the same. Due to space limitations, we will only consider the following, and the conclusions can be extended to the same.
In the calculation, all the formulas are discretized, and the sums are long-time shots and exits. The sample window is substituted into (3) in the sampling interval of the square and the square can be obtained, and the parameters can be seen to be unchanged. Seventy percent is proportional to the larger the spread of the waveform, and the degree of view is proportional to the score, the score, the dress recognition, 1 pick the wide and the first, sample. Considering that 5 can be up to 7 is the formula that we actually use when we carry out theoretical design calculations. It can be seen from Equation 7 that the part within the summation sign is inclusive or unrelated. This is inversely proportional to the relationship, and considering a real number, so for the outgoing beam, 1 letter, it is the same as the age of the ring. It only affects the intensity of the light, and 0 affects the distribution on the shirt, and does not affect the shape of the main beam of the output beam. Considering Equation 5 at the same time, it can be found that only the relative intensity and width of the outgoing beam lobes are actually affected, without affecting the uniform illumination of the main lobe.
In the discussion of the mountain 1 blood, we can find that we set a focal length of 10 for the main lens for any similar conclusions, in order to promote it.
The above derivation is obtained in any dimension and is naturally applicable to the circular symmetry that we often encounter in practice. We propagate the phase distributions of 2 with two and a half focal lengths of the main lens, and the results confirm our theoretical derivation.
4 positive and negative film asked in 1 real private plus, too, in, we also found positive and negative film asked. It is the part of our processing center called the ion beam. The slash part is processed by the original 1. Actual use. beam. From the bottom up, the incident is made to achieve the purpose of shaping. But if we change our mind, etch away the area of ​​the original 1 and leave the area that should have been etched as new, defined as negative, 4 right slash. The actual light intensity distribution is exactly the same, and the light is incident under the 6 mesh. As a result, what will happen? This is the theoretical model of positive and negative questions.
We consider the phase delay of the beam through the substrate area of ​​the positive and negative films, respectively. And then calculate the light intensity distribution of their respective cattle at the target site. Let the thickness of the substrate, mountain 0, be the thickness function of the cut. Take 2; take a form of real couple function with center symmetry, the mouth 2, 7 = 2.7. In the next derivation we will see this fake tear, the dish is stunned, Yuteng, Lin The ship, the stern, the regular square beam of the yeah also has a central symmetry. Therefore, the positive and negative films still have a good real ten.
The refractive index of the bitter substrate is . Then the phase retardation of the positive and negative films is divided into two parts, which are taken into the equation 1. For example, the uniform illumination can be obtained. The actual incident, + is the equipotential phase, and the amplitude is super Gaussian. So you can also use the real and imaginary parts to note that they are all real functions and you can see them. When the positive and negative films shape the equipotential wave field incident on the same light intensity distribution, although the field light intensity uniformity is obtained in the shooting field, the concern is only the field light intensity distribution. So the positive and negative films are for our requirements.
It is completely equivalent. This conclusion provides us with a new idea for processing large diameters under existing conditions.
We only use a kind of ion beam rotary etching, which can realize the real sense of continuous phase distribution. 560 is the mask of the processed positive film designed for the phase distribution of 2 left. Among them, the mask which is comforting is easy to process. However, in many cases, the mask used to process the positive film will be more difficult or less cumbersome, and then one mask can be added instead, and the production can also meet our requirements. In the mask of the example 513, if the positive film is processed, the mask plate should be hollowed out to the same etch depth corresponding to the same mask opening angle, and the hollowed-out sector area may be excessively large, exceeding the uniform ion source range of the etching machine. Asked. However, if we consider the same effect of the positive and negative film on beam shaping, instead of processing the negative film, that is, hollowing on the mask, the area is 5, which is obviously convenient for processing the mask, thereby reducing the process error and improving the device. quality.
It is pointed out that the plano-lens left and right convex lenses in 6 can also be regarded as right and negative, but their respective light intensity distributions are obviously different. In fact, this question is not contradictory to our conclusion. The positive and negative films we refer to are located in position 1 in the optical system, and their function is before the main lens enters the Fourier transform of the incident beam. Change the phase of the incident light. We have set a wavelength of one degree and then the main lens of the Fourier transform has a few centimeters, so the 1 phase pays the main lens of the factory and the effect of 3 is similar to that of the mechanical mechanics. ; disturbance, so that after the Fourier transform will produce the light intensity distribution we need, which also reflects the mechanism of the smooth convex laser sharp surface shaping. And this kind of perturbation to light, whether it is similar. The effect of the kind of 17186, 1 mirror or similar kind of convex low-lighting strong junction is the same. This is indistinguishable from the convergence and divergence functions produced by the individual lenses and the concave lenses. The nativeplates 5 conclusion article revealed that the relationship between the juice and the actual system should be based on various parameter indicators, to solve the versatility of the mouth and ask the new positive and negative speculation. Then the art production has important guiding significance.
The design of the size phase component 1 China Laser, 19 Ma Wang. Hey, Li Tao, Li Yongping. Phase component latitude analysis for use. Photoelectric Engineering, 1999, 5 Pity Zhong Yiqiong. Wang Hao. Today's level and so on. The effect of ion-cracking process error 1 on uniform illumination.
Photoelectric engineering. Waiting for the 419 discs to comment on the beginning of the seal, this touch toe cuddles the coffee public 1 ring pet stone 祜 34, connected to page 517
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